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Performance characterization of an xy-stage applied to micrometric laser direct writing lithography

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Performance characterization of an xy-stage applied to micrometric laser direct writing lithography
Date
2017
Author
Jaramillo J.
Zarzycki A.
Galeano J.
Sandoz P.

Citation

       
TY - GEN T1 - Performance characterization of an xy-stage applied to micrometric laser direct writing lithography AU - Jaramillo J. AU - Zarzycki A. AU - Galeano J. AU - Sandoz P. Y1 - 2017 UR - http://hdl.handle.net/20.500.12622/3479 AB - ER - @misc{20.500.12622_3479, author = {Jaramillo J. and Zarzycki A. and Galeano J. and Sandoz P.}, title = {Performance characterization of an xy-stage applied to micrometric laser direct writing lithography}, year = {2017}, abstract = {}, url = {http://hdl.handle.net/20.500.12622/3479} }RT Generic T1 Performance characterization of an xy-stage applied to micrometric laser direct writing lithography A1 Jaramillo J. A1 Zarzycki A. A1 Galeano J. A1 Sandoz P. YR 2017 LK http://hdl.handle.net/20.500.12622/3479 AB OL Spanish (121)
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85011662546&doi=10.3390%2fs17020278&partnerID=40&md5=5096edbe32fc296b8b8268928bae6caf
URI
http://hdl.handle.net/20.500.12622/3479
DOI
10.3390/s17020278
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