Performance characterization of an xy-stage applied to micrometric laser direct writing lithography

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Date

2017

Author

Jaramillo J.

Zarzycki A.

Galeano J.

Sandoz P.

Metadata

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Source

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85011662546&doi=10.3390%2fs17020278&partnerID=40&md5=5096edbe32fc296b8b8268928bae6caf

URI

http://hdl.handle.net/20.500.12622/3479

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