TY - GEN
T1 - Performance characterization of an xy-stage applied to micrometric laser direct writing lithography
AU - Jaramillo J.
AU - Zarzycki A.
AU - Galeano J.
AU - Sandoz P.
Y1 - 2017
UR - http://hdl.handle.net/20.500.12622/3479
AB -
ER -
@misc{20.500.12622_3479,
author = {Jaramillo J. and Zarzycki A. and Galeano J. and Sandoz P.},
title = {Performance characterization of an xy-stage applied to micrometric laser direct writing lithography},
year = {2017},
abstract = {},
url = {http://hdl.handle.net/20.500.12622/3479}
}RT Generic
T1 Performance characterization of an xy-stage applied to micrometric laser direct writing lithography
A1 Jaramillo J.
A1 Zarzycki A.
A1 Galeano J.
A1 Sandoz P.
YR 2017
LK http://hdl.handle.net/20.500.12622/3479
AB
OL Spanish (121)
