Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12622/1016| Title: | Fabricación de sistemas MEMS – un caso de estudio en la fabricación de un micro-espejo |
| Authors: | Zarzycki, Artur Gambin, Wiktor L. Bargiel, Sylwester Gorecki, Christophe |
| Keywords: | MEMS microsistemas micro fabricación micro tecnología micro-escáner micro espejo de escaneo. |
| Issue Date: | 2-May-2017 |
| URI: | http://hdl.handle.net/20.500.12622/1016 |
| Other Identifiers: | https://revistas.itm.edu.co/index.php/tecnologicas/article/view/697 10.22430/22565337.697 |
| Appears in Collections: | Vol. 20 Núm. 39 (2017) |
Files in This Item:
| File | Size | Format | |
|---|---|---|---|
| 697-Manuscrito-984-1-10-20180411.pdf | 1.76 MB | Adobe PDF | View/Open |
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